Lithography uses three basic process steps Transfer the pattern from the mask to the wafer: to paint, develop, expose. In a subsequent process, the pattern is transferred to the surface layer of the wafer. In some cases, the resist pattern can also be used to define the pattern of the deposited thin film.

What is lithography and how does it work?

Lithography is a Patterning process in which photopolymers are selectively exposed through a maskleaving a latent image in the polymer, which can then be selectively dissolved to provide patterned access to the underlying substrate.

Why use photolithography?

Photolithography is one of the most important and easiest methods of microfabrication, and it is For creating detailed patterns in materials. In this method, shapes or patterns can be etched by selectively exposing the photopolymer to UV light.

Why is UV light used for lithography?

photolithography Cells can be 3D encapsulated in hydrogels by crosslinking cell-containing prepolymers under UV light. Use a photomask to obtain the desired pattern [88].

What are the requirements for a lithography machine?

In general, the photolithography process requires Three basic materials, light source, photomask and photoresist. Photoresist is a kind of photosensitive material, there are two kinds of positive film and negative film. Positive photoresists become more soluble after exposure to a light source.

Lithography: Step by Step

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